Our multi hearth electron beam evaporators featuring modular source architecture. The sources were designed for applications requiring high-rate evaporation as well as tight beam control for challenging materials. 

The modular principle of the sources allows for setting up the individual source from a common stand-alone emitter and magnet deflection module. Various drive and crucible modules can be attached to form either a single hearth or multi hearth evaporator with an extensive range of pocket geometry.

Features

• Tightly controlled beam spot distribution
• Optimized beam deflection system
• Highly efficient crucible & magnet cooling system
• Rugged filament block system
• High-torque DC motor drive

Benefits 

• Uniform material depletion & reduced beam curl 
• Minimized generation of secondary electrons
• High evaporation rates & reliable operation
• Ease of maintenance with reproducible filament installation
• Precise pocket positioning 

Specifications 

	EB M-4×4	EB M-6 II EB S-6 II	EB M-8 II EB S-8 II	EB M-10 II EB S-10 II
Max. operating power:	4 kW	6 kW	8 kW	10 kW
High voltage:	4-10 kV
Deflection current(x/y):	+/- 3A
Beam diameter:	3 mm, minimum beam shape distortion across pocket area
Pocket positioning:	High torque DC motor with optical positioning feedback on atmosphere (EBM-series) Encapsulated high torque DC motor with optical positioning feedback in vacuum (EBS-series)
Typical pocket configurations:	4 x 4 cm³	4 x 8 cm³ 6 x 6 cm³ 8 x 4 cm³	4 x 40 cm³ 6 x 20 cm³ 8 x 15 cm³	4 x 60 cm³, 6 x 40 cm³ 8 x 20 cm³
Dimensions; Vacuum (H x W x L in mm; M-/S-series):	120 x 87 x 206	130 x 112 x 250 164 x 112 x 282	130 x 150 x 304 164 x 150 x 304	130 x 190 x 34 164 x 190 x 346

Options

• Free source positioning in chamber (EBS-series)
• Magnetic crucible cover plate for reduced secondary electron bombardment towards substrate
• Customer specified pocket geometry
• Ferrofluid sealed rotary feedthrough for crucible rotation (only EBM-series); allows base pressure down to 1E-9 mBar