The new generation of SmartBeam electron beam evaporators is used for the deposition of high purity and thin layers in a high vacuum environment. Its modular design principle enables the assembly of different kind of sources and sizes from common parts. An identical stand – alone emitter and deflection unit is connected with both single hearth or multi hearth evaporator units. Control of the electron beam evaporator is compatible with conventional power supplies. Hence, even the replacement of evaporators of the old generation can be facilitated.